Exposed linear encoders from HEIDENHAIN are optimized for use in dynamic, high-accuracy machines, including those required in front-end semiconductor manufacturing, where they ensure high long-term stability and are easy to install.
In these applications, the ERP series of modular optical angle encoders without an integral bearing can be deployed on large hollow shafts and for high shaft speeds of up to 20 000 rpm. Their particularly low mass and low mass moment of inertia negate the need for additional starting torque. This is of great benefit for machines employed in semiconductor manufacturing.
ETEL motion systems offer expansion stages ranging from a standalone X axis to complete seven-axis system solutions, thus covering a wide range of applications in the field of semiconductor manufacturing. ETEL expertise in motors and electronics is vertically integrated with HEIDENHAIN control expertise, resulting in significant benefits such as an excellent bidirectional repeatability of ±250 nm.