Semiconductors are changing the world. We’re helping change how they’re made.

With a suite of industry-leading technologies that provide the exact combination of controlled motion, nano-precise positioning and the fast feedback semiconductor manufacturers need, HEIDENHAIN and ETEL are world-class partners for everything from lens grinding to dicing and inspecting complex wafers.

Call 1-847-490-1191 or click here to get in touch.

Why the leaders in semiconductor production choose HEIDENHAIN

Meeting demanding precision requirements – HEIDENHAIN has 125-year history in encoders, offering angle encoders with resolutions up to 29 bits and accuracy down to ± 0.4 (arcseconds)

The variety for changing techniques and technology – From linear to angle encoders ideal for any environment to motion systems dedicated to semiconductor back-end processes, our family of brands has nearly every application covered.

Placement accuracy in the µm range – ETEL’s Telica motion system handles the requirements of next-generation packages within ideal working ranges.

Semiconductor Resources

Exposed Linear Encoders

Exposed Linear Encoders

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Exposed linear encoders for high vacuum

Product Information: LIC 4113V, LIC 4193V Exposed linear encoders for high vacuum

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Product Information: LIP 471, LIP 481 Exposed Linear Encoders

Product Information: LIP 471, LIP 481
Exposed Linear Encoders

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Product Information: LIP 481V, LIP 481 U Exposed linear encoders for high and ultrahigh vacuum technology

Product Information: LIP 481V, LIP 481 U Exposed linear encoders for high and ultrahigh vacuum technology

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Stories & Articles

High-Precision Positioning of Inspection Items in the X-Ray Beam

CT systems with rotary tables and angle encoder modules with roller bearings In the domain of non-destructive materials testing, computed tomography (CT) is a technology that provides a unique three-dimensional view of inspection items. For example, it permits precise geometrical measurement of the inner structures of components, comparison with CAD data and the detection of […]

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High-Precision Drives for the Optical Industry

Schüssler-Technik in Pforzheim, Germany, is divided into two divisions. The first division manufactures primarily milling, bending and laser soldering machines for the manufacture of eyeglass frames. The second is occupied with the R&D and sale of direct drives.

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A New Dimension in the Nanometer Range

The trend in the semiconductor industry to ever higher levels of integration and, with it, to continuously finer structures, calls for measuring devices with high resolution for positioning to the nanometer in the manufacturing process and in measuring and inspection technology. Measuring error due to guideway influences and thermal expansion, which at present cannot be compensated by computation, can be ascertained by a new measuring device and therefore significantly reduced.

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