With a suite of industry-leading technologies that provide the exact combination of controlled motion, nano-precise positioning and the fast feedback semiconductor manufacturers need, HEIDENHAIN and ETEL are world-class partners for everything from lens grinding to dicing and inspecting complex wafers.
Call 1-847-490-1191 or click here to get in touch.
Meeting demanding precision requirements – HEIDENHAIN has 125-year history in encoders, offering angle encoders with resolutions up to 29 bits and accuracy down to ± 0.4 (arcseconds)
The variety for changing techniques and technology – From linear to angle encoders ideal for any environment to motion systems dedicated to semiconductor back-end processes, our family of brands has nearly every application covered.
Placement accuracy in the µm range – ETEL’s Telica motion system handles the requirements of next-generation packages within ideal working ranges.
HEIDENHAIN’s leading edge motion feedback technology is a technology enabler for OEMs in the semiconductor market. Breaking through the barrier of having high accuracy and high throughput rates, HEIDENHAIN linear and angular encoders are used in the most demanding applications like lithography, process diagnosis, flat panel, and advanced packaging. From picometers to microns, and nanoradians to arc minutes, our breadth of product line has been serving this advanced motion control industry for decades and is currently enabling machine designs that push the limits far beyond what was thought possible even 5 years ago.
GET MORE INFO
Product Information: LIP 481V, LIP 481 U Exposed linear encoders for high and ultrahigh vacuum technology
Learn More
High-Precision Positioning of Inspection Items in the X-Ray Beam
CT systems with rotary tables and angle encoder modules with roller bearings In the domain of non-destructive materials testing, computed tomography (CT) is a technology that provides a unique three-dimensional view of inspection items. For example, it permits precise geometrical measurement of the inner structures of components, comparison with CAD data and the detection of […]
High-Precision Drives for the Optical Industry
Schüssler-Technik in Pforzheim, Germany, is divided into two divisions. The first division manufactures primarily milling, bending and laser soldering machines for the manufacture of eyeglass frames. The second is occupied with the R&D and sale of direct drives.
A New Dimension in the Nanometer Range
The trend in the semiconductor industry to ever higher levels of integration and, with it, to continuously finer structures, calls for measuring devices with high resolution for positioning to the nanometer in the manufacturing process and in measuring and inspection technology. Measuring error due to guideway influences and thermal expansion, which at present cannot be compensated by computation, can be ascertained by a new measuring device and therefore significantly reduced.
Contact us to learn more about our semiconductor solutions.
333 East State Parkway
Schaumburg, IL 60173-5337 USA
Tel. 1-847-490-1191
Fax: 1-847-490-3931
Sign up for our e-newsletter
Stay up to date with the latest news, application stories and products.
